• 专利标题:   Intraconnection structure useful in a post-section process of an integrated circuit i.e. semiconductor device, has second portion of conductive layer adjacent to first portion of conductive layer, and dielectric material contacts first interface portion and third interface portion.
  • 专利号:   CN115084067-A, US2022359414-A1, TW202245144-A, US11640940-B2
  • 发明人:   MU X, LI M, YANG S, ZHAN Y, LI S, SHUE S, LEE M, CHAN Y
  • 专利权人:   TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD, TAIWAN SEMICONDUCTOR MFG CO LTD
  • 国际专利分类:   H01L021/768, H01L023/48, H01L023/528, H01L023/532, H01L023/485
  • 专利详细信息:   CN115084067-A 20 Sep 2022 H01L-023/48 202291 Chinese
  • 申请详细信息:   CN115084067-A CN10492483 07 May 2022
  • 优先权号:   US314269

▎ 摘  要

NOVELTY - The structure has a first portion of a conductive layer. The conductive layer includes at least one graphene layers. The first portion of the conductive layer includes a first interface portion and a second interface portion opposite to each other. The first interface portion and the second interface portion includes a metal between adjacent multiple graphene layers. A second portion of the conductive layer is adjacent to the first portion of the conductive layer. The second portion of the conductive layer includes a third interface portion and a fourth interface portion facing each other. The third interface portion and the fourth interface portion includes that the metal is located between adjacent multiple graphene layer. A dielectric material is placed between the first portion and the second portion of the conductive layer. The dielectric material contacts the first interface portion and the third interface portion. USE - The intraconnection structure is useful in a post-section process of an integrated circuit (IC) i.e. semiconductor device. ADVANTAGE - The intraconnection structure is simple and cost-efficient. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of one of various stages of fabricating a semiconductor device. 100Semiconductor device structure 102Substrate 104Source/drain regions 108Channel area 112Interface dielectric layer 114Gate dielectric layer 116Compliant layer 118Gate spacers 120Silicide layer 122Conductive contacts 124Contact etch stop layer 126Interlayer dielectric layer 128Dielectric material 130Conductive contact 200Device