• 专利标题:   Structured growth of graphene on surface of non-amorphous substrate involves introducing foreign atoms comprising atoms of element other than substrate with aid of mask into substrate in area of surface of substrate, and growing graphene on surface of substrate.
  • 专利号:   DE102020110814-A1
  • 发明人:   SCHEIT A
  • 专利权人:   IHP GMBHINNOVATIONS HIGH PERFORMANCE MI
  • 国际专利分类:   C01B032/184, H01L021/18
  • 专利详细信息:   DE102020110814-A1 21 Oct 2021 C01B-032/184 202195 Pages: 22 German
  • 申请详细信息:   DE102020110814-A1 DE10110814 21 Apr 2020
  • 优先权号:   DE10110814

▎ 摘  要

NOVELTY - Structured growth of graphene (24) on a surface of a non-amorphous substrate (10) involves introducing number of foreign atoms (18) with an aid of a mask (32) into the substrate in an area (30) of the surface of the substrate, and growing graphene (24) on the surface of the substrate (10). The surface of the substrate in the area is modified in such a way that a growth of graphene in the area is suppressed. The foreign atoms contain atoms of an element other than the substrate. The graphene grows in an area (40) of the surface of the substrate structured by the area (30). USE - Structured growth of graphene. ADVANTAGE - The method is simple and economical, and grows the graphene selectively in pre-structured areas of the surface in large quantities. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for layer system, which comprises a non-amorphous substrate for growing graphene, graph grown on the area (40) of the surface of the substrate which is structured by the area (30) and not doped with the foreign atoms that growth of graphs is suppressed. The substrate is doped with number of foreign atoms in the area (30) of a surface of the substrate and the surface of the substrate in the area is modified in such a way that the growth of graphene in the area (30) is suppressed, the foreign atoms contain atoms of an element other than the substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of illustrating structured growth of the graphene on the substrate. Non-amorphous substrate (10) Foreign atoms (18) Graphene (24) Areas (30,40) Mask (32)