• 专利标题:   Preparing multilayer article from semiconductor substrate involves forming metal film on front of substrate; forming layer of boron nitride; and forming layer of graphene between substrate and the back metal film surface.
  • 专利号:   US2013240830-A1, WO2014182540-A1, US9029228-B2, EP2994933-A1, KR2016036012-A, JP2016526286-W, JP6228293-B2, JP2018050052-A, JP6488350-B2, JP2019125793-A, JP6567208-B2
  • 发明人:   SEACRIST M R, BERRY V, NGUYEN P T
  • 专利权人:   SEACRIST M R, BERRY V, NGUYEN P T, UNIV KANSAS STATE RES FOUND, SUNEDISON SEMICONDUCTOR PTE LTD, UNIV KANSAS STATE RES FOUND, SUNEDISON SEMICONDUCTOR LTD, MEMC ELECTRONIC MATERIALS INC, SUNEDISON SEMICONDUCTOR LTD, UNIV KANSAS STATE RES FOUND, SUNEDISON SEMICONDUCTOR LTD, SUNEDISON SEMICONDUCTOR LTD, UNIV KANSAS STATE RES FOUND
  • 国际专利分类:   H01L021/02, H01L029/16, C01B031/04, H01L021/314, B82Y030/00, B82Y040/00, H01L021/331, H01L021/8222, B32B009/00, B32B009/04, C23C016/34, H01L021/205, C01B021/064, C23C016/26, C23C016/38, H01L021/208, H01L021/318, C01B032/184, C01B032/186, B32B015/04, C30B029/64, H01L021/31
  • 专利详细信息:   US2013240830-A1 19 Sep 2013 H01L-021/02 201364 Pages: 15 English
  • 申请详细信息:   US2013240830-A1 US890316 09 May 2013
  • 优先权号:   US548899P, US890316

▎ 摘  要

NOVELTY - Preparing a multilayer article from a semiconductor substrate (30), involves forming a metal film on the front surface of the semiconductor substrate, where the metal film comprises a front metal film surface, a back metal film surface, and a bulk metal region between the front and back metal film surfaces; forming a layer of boron nitride between the front surface of the semiconductor substrate and the back metal film surface; and forming a layer of graphene between the front surface of the semiconductor substrate and the back metal film surface. USE - For preparing a multilayer article (claimed). ADVANTAGE - The method prepares graphene layer directly on a semiconductor substrate, i.e. without a layer transfer step and direct formation on the semiconductor substrate does not preclude the presence of an intervening layer, e.g., a layer of an isoelectronic material such as boron nitride; and that graphene exhibits high thermal conductivity, high mechanical strength (strongest nanomaterial), high optical transparency (97%), carrier controlled interband/optical-transition and flexible structure. DETAILED DESCRIPTION - Preparing a multilayer article from a semiconductor substrate (30) comprising two major, generally parallel surfaces, one of which is the front surface of the semiconductor substrate and the other of which is a back surface of the semiconductor substrate, and a circumferential edge joining the front and back semiconductor substrate surfaces, involves forming a metal film on the front surface of the semiconductor substrate, where the metal film comprises a front metal film surface, a back metal film surface, and a bulk metal region between the front and back metal film surfaces, where the back metal film surface is in contact with the front semiconductor substrate surface; forming a layer of boron nitride between the front surface of the semiconductor substrate and the back metal film surface; and forming a layer of graphene between the front surface of the semiconductor substrate and the back metal film surface. INDEPENDENT CLAIMS are included for the following: (1) preparing a semiconductor substrate involving forming a first metal film on the front surface of the semiconductor substrate; forming a layer of boron nitride between the front surface of the semiconductor substrate and the back metal film surface; removing the first metal film; depositing a layer comprising a carbon-rich polymer on the layer of boron-nitride; forming a second metal film on the carbon-rich polymer layer, where the second metal film comprises a front metal film surface, a back metal film surface, and a bulk metal region between the front and back metal film surfaces, where the back metal film surface is in contact with the layer comprising the carbon-rich polymer; and heating the semiconductor substrate comprising the layer of boron-nitride, where the layer comprises the carbon-rich polymer, and the second metal film on it in the presence of hydrogen to a temperature sufficient to degrade the carbon-rich polymer layer; and precipitating carbon atoms to thereby form a layer of graphene between the layer of boron nitride and the back metal film surface; and (2) a multilayer article comprising a semiconductor substrate comprising two major, generally parallel surfaces, one of which is the front surface of the donor substrate and the other of which is a back surface of the donor substrate, a circumferential edge joining the front and back surfaces, and a central plane between the front and back surfaces; a layer of boron nitride in contact with the front surface of the semiconductor substrate; and a layer of graphene in contact with the layer of boron nitride. DESCRIPTION OF DRAWING(S) - The figure shows initial structure of the semiconductor substrate. Carbon-containing gas (12) Gas (22) Semiconductor substrate (30) Dielectric layer (40) Metal layer (50)