• 专利标题:   Composite substrate used for optoelectronic component and thin film solar battery, comprises single graphene layer and metal nano array layer.
  • 专利号:   CN102942178-A
  • 发明人:   REN F, YING J, JIANG C, XIAO X, DAI Z
  • 专利权人:   UNIV WUHAN
  • 国际专利分类:   B82Y030/00, B82Y040/00, C01B031/04, C23C014/04, C23C014/14, C23C016/01, C23C016/26
  • 专利详细信息:   CN102942178-A 27 Feb 2013 C01B-031/04 201353 Pages: 9 Chinese
  • 申请详细信息:   CN102942178-A CN10476861 22 Nov 2012
  • 优先权号:   CN10476861

▎ 摘  要

NOVELTY - A composite substrate comprises single graphene layer and metal nano array layer. USE - Composite substrate used for optoelectronic component and thin film solar battery. ADVANTAGE - The method has simple operation and cheap raw materials. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for preparation of composite substrate comprising performing liquid level self-assembly method for preparing nanosphere mask, vacuum film coating, removing nanosphere mask plate to obtain metal nano array, performing chemical-mechanical polishing, carrying out chemical vapor deposition, coating with adhesive layer on metal substrate, etching, washing, drying and removing photoresist layer.