• 专利标题:   Manufacture of graphene film used for e.g. next-generation transistor, involves transferring graphene film with supporting film to graphene film on another substrate, and transferring laminated graphene films to another substrate.
  • 专利号:   WO2015060419-A1, US2016221830-A1, JP2015543921-X
  • 发明人:   HAYASHI K
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   C01B031/02, B32B037/00, B32B038/10, C01B031/04, C01B032/15, C01B032/18, C01B032/182
  • 专利详细信息:   WO2015060419-A1 30 Apr 2015 C01B-031/02 201531 Pages: 36 Japanese
  • 申请详细信息:   WO2015060419-A1 WOJP078318 24 Oct 2014
  • 优先权号:   JP222291

▎ 摘  要

NOVELTY - A graphene film (12) is formed on substrate (s1). A supporting film (14) is coated on the graphene film (12), and the substrate (s1) is removed. A graphene film (18) is formed on substrate (16). The graphene film (12) is supported by supporting film is transferred to the graphene film (18) formed on substrate (16). The substrate (16) is removed, such that the laminated graphene films (12,18) are supported by the supporting film. The laminated graphene films (12,18) are transferred onto substrate (s3), and the supporting film is removed, to obtain graphene film. USE - Manufacture of graphene film used for next-generation transistor and next-generation large-scale integration fine wiring. ADVANTAGE - The method enables manufacture of graphene film without deteriorating characteristics of graphene film due to residue of supporting film. DETAILED DESCRIPTION - A graphene film (12) is formed on substrate (s1). A supporting film (14) is coated on the graphene film (12). The substrate (s1) is removed, such that the graphene film (12) is supported by supporting film. A graphene film (18) is formed on substrate (16). The graphene film (12) is supported by supporting film is transferred to the graphene film (18) formed on substrate (16), such that the graphene film (12) is laminated on the graphene film (18). The substrate (16) is removed, such that the laminated graphene films (12,18) are supported by the supporting film. The laminated graphene films (12,18) are transferred onto substrate (s3), and the supporting film is removed, such that the laminated graphene films (12,18) are arranged on the substrate (s3), to obtain graphene film. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of manufacture of graphene film. Graphene films (12,18) Support film (14) Substrate (16)