▎ 摘　　要

NOVELTY - Micro-nano multi-stage self-compensation structure comprises carbon nanotube slurry, carbon black slurry and/or graphene slurry sprayed on a substrate, and carbon nano-tube slurry is sprayed on the substrate. USE - Micro-nano multi-stage self-compensation structure for a flexible pressure sensor, intelligent manufacturing, intelligent medical, education service, deep space detection, national defense and military fields. ADVANTAGE - The micro-nano multi-stage self-compensation structure has a high degree of freedom, high sensitivity and large measuring range, improved adhesive force of the force sensitive film, adjusted surface resistance range of the film, and improved sensitivity and range of micro-nano interlocking force sensitive device.