▎ 摘　　要

NOVELTY - Method of creating layers of graphene, comprises: implanting carbon atoms into a substrate at a first temperature; and lowering the temperature of the substrate following the implanting step, so that the carbon atoms diffuse from the substrate. USE - The method is useful for creating layers of graphene or graphene-based compounds (all claimed). ADVANTAGE - The method provides finer growth of graphene in large scale. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method of creating layers of graphene-based compounds, comprising: implanting carbon atoms into a substrate at a first temperature; implanting atoms of a second species into the substrate; and lowering the temperature of the substrate following the carbon implanting step, so that the atoms of the second species bond to the carbon atoms and the carbon and the second species diffuse from the substrate.