• 专利标题:   Ceramic/copper/graphene assembly used as heat radiating member, has structure in which ceramic member, copper member and graphene-containing carbonaceous member are joined, active metal carbide layer, and magnesium solid solution layer.
  • 专利号:   WO2021100860-A1, JP2021088502-A, CN114728858-A, KR2022106748-A, EP4063340-A1, US2022410529-A1
  • 发明人:   NOBUYUKI T, TERASAKI N
  • 专利权人:   MITSUBISHI MATERIALS CORP, MITSUBISHI MATERIALS CORP, MITSUBISHI MATERIALS CORP, MITSUBISHI MATERIALS CORP
  • 国际专利分类:   C04B037/02, H05K007/20, B23K020/00, B32B009/00, B32B009/04, H05K001/02, H05K001/05, H05K003/00, H05K003/38, B32B015/16, B32B037/10, B32B037/14, B32B037/24, B32B007/03, B32B007/10
  • 专利详细信息:   WO2021100860-A1 27 May 2021 202147 Pages: 38 Japanese
  • 申请详细信息:   WO2021100860-A1 WOJP043413 20 Nov 2020
  • 优先权号:   JP211422, JP192559, CN80079465, KR716392

▎ 摘  要

NOVELTY - Ceramic/copper/graphene assembly has a structure in which a ceramic member, a copper member made of copper or its alloy, and a graphene-containing carbonaceous member containing a graphene aggregate are joined, an active metal carbide layer containing carbides of one or more active metals chosen from titanium, zirconium, niobium, and hafnium is formed on the graphene-containing carbonaceous member side at a joining interface between the copper member and the graphene-containing carbonaceous member, and a magnesium solid solution layer in which magnesium is in a state of solid solution in a copper parent phase is formed between the active metal carbide layer and the copper member. USE - The assembly is used as a heat radiating member for a device. ADVANTAGE - The assembly suppresses cracks and peeling at the bonding interface during a cold cycle load, and reliably joins the copper member and the graphene-containing carbonaceous material. The assembly has improved heat conduction characteristics of the graphene-containing carbonaceous member, and increases strength of bonding with the active metal carbide layer, and maintains the bonding between the copper member and the graphene-containing carbonaceous member. The assembly maintains stable heat dissipation characteristics while suppressing the occurrence of peeling at the joint interface due to the thermal cycle, and realizes high reliability and excellent thermal conductivity. The assembly firmly bonds a copper member and a graphene-containing carbonaceous member to each other, suppresses the current flowing through the bonded portion, results in a cold cycle, and has excellent thermal cycle reliability, without peeling even under load. The assembly has a function of efficiently dissipating heat as a heat spreader in the transitional period. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a method for manufacturing a ceramic/copper/graphene assembly, involving (a) a copper/graphene joining by joining the copper member and the graphene-containing carbonaceous member, (b) a copper/ceramics joining by joining the copper member and the ceramics member, (c) in step (a), performing an active metal and magnesium placement step in which one or more active metals chosen from titanium, zirconium, niobium, and hafnium, and magnesium are placed between the copper member and the graphene-containing carbonaceous member, (d) laminating the copper member and the graphene-containing carbonaceous member through the active metal and magnesium, and (e) joining the copper member laminated through the active metal and magnesium, and the graphene-containing carbonaceous member by heat treatment in a vacuum atmosphere while being pressurized in the stacking direction, where in the step (c), the amount of active metal is 0.4 mu mol/cm2 or more and the amount of magnesium is 14 mu mol/cm2 or more; and (2) a ceramic/copper/graphene joining structure having structure in which a ceramic member, a copper member made of copper or its alloy, and a graphene-containing carbonaceous member containing a graphene aggregate are joined, an active metal carbide layer containing carbides of one or more active metals chosen from titanium, zirconium, niobium, and hafnium is formed on the graphene-containing carbonaceous member side at a joining interface between the copper member and the graphene-containing carbonaceous member, and a magnesium solid solution layer in which magnesium is in a state of solid solution in a copper parent phase is formed between the active metal carbide layer and the copper member. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic explanatory view of a ceramic/copper/graphene assembly (insulated substrate). Insulating substrate (20) Copper plate (21) Carbon plate (25) Ceramic plate (26)