• 专利标题:   Device used for facilitating continuous roll-to-roll growth of thin films of graphene, comprises machine body that is connected to worktable, where worktable is connected to first and second vacuum chambers having vacuum machine.
  • 专利号:   CN105624640-A
  • 发明人:   KONG L, WU K, WANG Z
  • 专利权人:   ANHUI BEQ EQUIP TECHNOLOGY CO LTD
  • 国际专利分类:   C23C016/26, C23C016/513, C23C016/54
  • 专利详细信息:   CN105624640-A 01 Jun 2016 C23C-016/26 201649 Pages: 6 Chinese
  • 申请详细信息:   CN105624640-A CN10076751 31 Jan 2016
  • 优先权号:   CN10076751

▎ 摘  要

NOVELTY - Device comprises machine body (1) that is connected to worktable (2). Worktable is connected to first and second vacuum chambers (3, 4). Upper portion of vacuum chamber is connected to vacuum machine. Vacuum chamber is provided with air inlet (5). Former vacuum chamber is connected with latter vacuum chamber having air outlet (6). Vacuum chambers have unreeling roller and winding up roller provided with rotating electrical machine. Both vacuum chambers are connected by vacuum pipe. Vacuum chamber is provided with radio frequency plasma generator, heating furnace, and liquid nitrogen cold trap. USE - Device used for facilitating growth of roll-to-roll continuous graphene thin film (claimed). ADVANTAGE - The device is suitable for large-scale production of graphene, and ensures fast and continuous growth of thin films of graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for performing continuous roll-to-roll growth of thin films of graphene, which involves: (A) putting rolled copper foil into discharging roller in vacuum chamber; (B) adjusting air pressure lower than 0.3 megapascals; (C) starting heating furnace to maintain temperature of 500-650 degrees C; (D) introducing hydrogen and methane; (E) starting radio frequency plasma generator; (F) adjusting glow area; (G) performing film growth on copper foil under argon protection; (H) adding liquid nitrogen to liquid nitrogen trap to facilitate cooling; and (I) discharging obtained product by outlet. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of device. Machine body (1) Worktable (2) Vacuum chambers (3, 4) Air inlet (5) Air outlet (6)