• 专利标题:   Manufacture of graphene layer used for electronic circuit, involves mounting molecular beam epitaxy chamber on substrate and forming graphene layers by supplying carbon source on substrate.
  • 专利号:   KR2011056869-A, KR1611414-B1
  • 发明人:   SEO D
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, UNIV LELAND STANFORD JUNIOR, UNIV LELAND STANFORD JUNIOR, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   C01B031/02, C23C016/26, H01L021/205
  • 专利详细信息:   KR2011056869-A 31 May 2011 C01B-031/02 201223 Pages: 6
  • 申请详细信息:   KR2011056869-A KR113363 23 Nov 2009
  • 优先权号:   KR113363

▎ 摘  要

NOVELTY - A molecular beam epitaxy chamber is mounted on a substrate, and the molecular beam epitaxy chamber is maintained at 500-860 degrees C and vacuum of 10-11 Torr. A carbon source is supplied on the substrate to form graphene layers by molecular beam epitaxy method. USE - Manufacture of graphene layer used for electronic circuit. ADVANTAGE - The method enables economical manufacture of layer of graphene having high purity.