• 专利标题:   Method for fabricating transparent UV photodetector, involves laying single-layer graphene electrode onto unmasked section of visibly transparent block with end of single-layer graphene electrode laid onto substrate.
  • 专利号:   US2020035850-A1, US10714649-B2
  • 发明人:   FARMER D, HAN S
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   H01L031/0224, H01L031/0296, H01L031/0352, H01L031/101, H01L031/18
  • 专利详细信息:   US2020035850-A1 30 Jan 2020 H01L-031/101 202011 Pages: 10 English
  • 申请详细信息:   US2020035850-A1 US590912 02 Oct 2019
  • 优先权号:   US994510, US590912

▎ 摘  要

NOVELTY - The method involves laying a first single-layer graphene electrode (13) onto a substrate (10). A visibly transparent block is patterned over an end of the first single-layer graphene electrode and portions of the substrate such that an edge of the visibly transparent block and an edge of the first single-layer graphene electrode are not coincident. A second single-layer graphene electrode is laid onto an unmasked section of the visibly transparent block with an end of the second single-layer graphene electrode laid onto the substrate. First and second conductive contacts (12) are deposited, where the first and second conductive contacts comprise materials selected from a group consisting of titanium, palladium and gold onto respective opposite ends of the first and second single-layer graphene electrodes. USE - Method for fabricating a transparent UV photodetector. ADVANTAGE - The method enables setting system parameters during epitaxial deposition process, so that the depositing atoms arrive at a deposition surface of the semiconductor substrate with sufficient energy to move about on the surface. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a first graphene electrode assembled between a conductive contact and a substrate surface. Substrate (10) Substrate surface (11) Conductive contacts (12) Single-layer graphene electrode (13)