• 专利标题:   Method for directly growing germanium quantum dot on high-temperature graphene substrate, involves utilizing substrate layer, growing germanium quantum dot layer by sputtering deposition technique followed by performing growth pause process.
  • 专利号:   CN107331716-A
  • 发明人:   YANG Y, TONG L, LONG J, QIU F, WANG R, ZHANG J, YANG J
  • 专利权人:   UNIV YUNNAN
  • 国际专利分类:   H01L031/028, H01L031/0352, H01L031/18
  • 专利详细信息:   CN107331716-A 07 Nov 2017 H01L-031/028 201783 Pages: 9 Chinese
  • 申请详细信息:   CN107331716-A CN10519733 30 Jun 2017
  • 优先权号:   CN10519733

▎ 摘  要

NOVELTY - A germanium quantum dot on a high-temperature graphene substrate directly growing method involves utilizing substrate layer, a graphene layer and a germanium quantum dot layer from bottom to top, growing germanium quantum dot layer by a sputtering deposition technique with a growth temperature of 100-590 degrees C for 100-500 seconds, followed by performing growth pause process. USE - Method for directly growing germanium quantum dot on a high-temperature graphene substrate. ADVANTAGE - The germanium quantum dot solves the problem of germanium dots prepared at room temperature do not crystallize, and has high density, small size, and better uniformity of the high-performance infrared photodetectors and other semiconductor optoelectronic device research and development.