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  • 专利标题:   Vacuum degree-measuring sensor consists of graphene nano-ribbon film comprising graphene nano-ribbon layers, and carries out sensing vacuum degree using resistance value of each of graphene nano-ribbon layers.
  • 专利号:   WO2018004088-A1, KR2018001225-A, KR1847269-B1
  • 发明人:   AHN S, JO H, NO T, KIM D, LEE C, SON J, AHN S I, JO H D, NO T H, KIM D K, LEE C H, SON J H
  • 专利权人:   UNIV SILLA
  • 国际专利分类:   C01B031/04, G01L021/12
  • 专利详细信息:   WO2018004088-A1 04 Jan 2018 G01L-021/12 201807 Pages: 20
  • 申请详细信息:   WO2018004088-A1 WOKR014801 16 Dec 2016
  • 优先权号:   KR080093

▎ 摘　　要

NOVELTY - A vacuum degree-measuring sensor consists of a graphene nano-ribbon film comprising graphene nano-ribbon layers. The sensor senses the vacuum degree using resistance value of each of graphene nano-ribbon layers. USE - Vacuum degree-measuring sensor (claimed). ADVANTAGE - The vacuum degree-measuring sensor has excellent deformation resistance, and enables sensing of vacuum degree with excellent sensitivity and high response rate.