• 专利标题:   Manufacture of graphene heat dissipation film, involves preparing substrate, supplying reactant gas and carrier gas containing carbon, and performing plasma, where plasma is electron cyclotron resonance plasma, microwave plasma or radio frequency plasma, and carrier gas has preset flow rate.
  • 专利号:   KR2022019305-A, KR2454850-B1
  • 发明人:   SONG Y L
  • 专利权人:   UNIV SUNGKYUNKWAN RES BUSINESS FOUND
  • 国际专利分类:   C01B032/184, H05H001/46, H05K009/00
  • 专利详细信息:   KR2022019305-A 17 Feb 2022 C01B-032/184 202230 Pages: 11
  • 申请详细信息:   KR2022019305-A KR099569 10 Aug 2020
  • 优先权号:   KR099569

▎ 摘  要

NOVELTY - Manufacture of a graphene heat dissipation film involves preparing a substrate, supplying a reactant gas and a carrier gas containing carbon, and performing plasma, where the plasma is an electron cyclotron resonance plasma, microwave plasma or radio frequency plasma, and the flow rate of the carrier gas is 5-300 sccm. USE - Manufacture of graphene heat dissipation film (claimed). ADVANTAGE - The method enables manufacture of graphene heat dissipation film with excellent thermal conductivity, high-quality within a short time at a low temperature.