▎ 摘 要
NOVELTY - Manufacture of a graphene heat dissipation film involves preparing a substrate, supplying a reactant gas and a carrier gas containing carbon, and performing plasma, where the plasma is an electron cyclotron resonance plasma, microwave plasma or radio frequency plasma, and the flow rate of the carrier gas is 5-300 sccm. USE - Manufacture of graphene heat dissipation film (claimed). ADVANTAGE - The method enables manufacture of graphene heat dissipation film with excellent thermal conductivity, high-quality within a short time at a low temperature.