• 专利标题:   Transfer method for graphene involves performing microwave treatment of bond sheet so that germanium-hydrogen bond is broken, and generating hydrogen such that graphene is peeled from substrate.
  • 专利号:   CN105088179-A, CN105088179-B
  • 发明人:   DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   C23C016/26
  • 专利详细信息:   CN105088179-A 25 Nov 2015 C23C-016/26 201617 Pages: 10 English
  • 申请详细信息:   CN105088179-A CN10532604 26 Aug 2015
  • 优先权号:   CN10532604

▎ 摘  要

NOVELTY - The transfer method involves providing germanium catalytic substrate (S1) into catalytic growth chamber. The catalytic substrate is heated to a preset temperature (S2), and a carbon source is grew into the chamber through catalytic substrate surface. A bonding substrate is provided, and the substrate is formed with a catalytic germanium graphene side of the bonded substrate. A microwave treatment is performed (S4) to the bonded sheet so that germanium-hydrogen bond is broken, and hydrogen is generated so that graphene is peeled from the substrate. USE - Transfer method for graphene. ADVANTAGE - Allows the repeated use of germanium catalyst substrate, saves the material, and achieves environmental protection. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart of the transfer method for graphite alkene. Germanium catalyst substrate providing step (S1) Catalyst substrate heating step (S2) Substrate bonding step (S3) Microwave treatment step (S4)