• 专利标题:   Synthesis of graphene involves implanting carbon in metal substrate via ion implantation, annealing with implanted carbon, cooling, transferring with graphene layer into dielectric layer, and removing metal substrate.
  • 专利号:   US2010224851-A1, US8309438-B2
  • 发明人:   COLOMBO L, WALLACE R M, RUOFF R S
  • 专利权人:   UNIV TEXAS SYSTEM, TEXAS INSTR INC
  • 国际专利分类:   C04B035/536, H01L021/20, H01L029/15
  • 专利详细信息:   US2010224851-A1 09 Sep 2010 H01L-029/15 201060 Pages: 10 English
  • 申请详细信息:   US2010224851-A1 US706116 16 Feb 2010
  • 优先权号:   US156991P, US706116

▎ 摘  要

NOVELTY - A graphene (408) is synthesized by implanting carbon in metal substrate via ion implantation, where carbon is distributed in metal substrate; annealing substrate with implanted carbon; cooling to precipitate carbon from metal (405) to form graphene layer on metal substrate surface; transferring with graphene layer into dielectric layer (401), where layer is placed on dielectric layer; and removing metal substrate. USE - Method of synthesizing graphene (claimed). ADVANTAGE - The method provides controlled quantities of carbon in metal, thus effectively growing graphene without the presence of hydrogen to reduce risk of defects. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a semiconductor device (400). DESCRIPTION OF DRAWING(S) - The drawing is a cross-sectional view of semiconductor device. Semiconductor device (400) Dielectric layer (401) Metal barrier (404) Metal (405) Graphene (408)