• 专利标题:   Electrically conductive device has conductor that penetrates through protein tube portion to graphene layer.
  • 专利号:   US2015137370-A1, US9087845-B2
  • 发明人:   WANG X, ZHANG H
  • 专利权人:   WANG X, ZHANG H, SEMICONDUCTOR MFG INT SHANGHAI CORP, SEMICONDUCTOR MFG INT BEIJING CORP
  • 国际专利分类:   H01L023/528, H01L023/532, H01L029/43
  • 专利详细信息:   US2015137370-A1 21 May 2015 H01L-023/528 201537 Pages: 13 English
  • 申请详细信息:   US2015137370-A1 US560729 04 Dec 2014
  • 优先权号:   CN10459310

▎ 摘  要

NOVELTY - The electrically conductive device has a graphene layer (313) on a substrate (315). A protein tube portion (308) is present on the graphene layer. A conductor (310) penetrates through the protein tube portion to the graphene layer. The conductor is in electrical contact with the graphene layer. The graphene layer is in electrical contact with an exposed conductive element on the substrate. The graphene layer has a thickness of 12 atomic layers or less. USE - Electrically conductive device. ADVANTAGE - The graphene layer is protected from being damaged because the protein tube portion and the conductor penetrating through the protein tube portion are formed on the graphene layer with the conductor in electrical contact with the graphene layer, and no etching is employed during the formation of the protein tube portion and the conductor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the electrically conductive device. Protein tube portion (308) Conductor (310) Graphene layer (313) Substrate (315)