▎ 摘 要
NOVELTY - Coating a metal workpiece with graphene by chemical vapor deposition involves exposing the workpiece to a carbon-containing precursor gas and a hydrogen gas in a processing chamber (12) in a phase (A), and exposing the workpiece to the carbon-containing precursor gas, hydrogen gas and a carrier gas (A) in the processing chamber in a phase (B) after the phase (A). The flow rate (A) of carbon-containing precursor gas and hydrogen gas into the processing chamber in the phase (A) is higher than the flow rate (B) of carbon-containing precursor gas and hydrogen gas in the phase (B). The total gas pressure (A) in the processing chamber in the phase (A) is lower than total gas pressure (B) in the processing chamber in the phase (B). USE - Coating metal workpiece with graphene for protecting workpiece e.g. electrical connector against corrosion. Uses include but are not limited to switches, screw terminals, spring clamps and insulation displacement connections. ADVANTAGE - The method provides high-quality coating due to prevention of perturbations and vibrations of the processing chamber using the damper elements, and provides coating having excellent conductivity and mechanical stability. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) coating system (10'), which comprises the processing chamber, a sample holder adapted to hold the metal workpiece in the processing chamber and a gas supply unit (16) in fluid communication with the processing chamber. The gas supply unit is provided to expose the metal workpiece to the carbon-containing precursor gas and hydrogen gas in the phase (A), and to expose the metal workpiece to the carbon-containing precursor gas, hydrogen gas and carrier gas (A) in the phase (B); and (2) computer program, which comprises computer-readable instructions. The computer is coupled to the system or implemented on the system. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the coating system. Coating system (10') Processing chamber (12) Gas supply unit (16) Frame unit (22) Heating unit (32)