▎ 摘　　要

NOVELTY - Manufacture of graphene involves providing a self-assembled monolayer mask on a graphene atomic layer, and etching the graphene atomic layer by irradiating an energy source. USE - Manufacture of graphene used for manufacturing electronic component (claimed) e.g. semiconductor device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of electronic component, which involves etching graphene atomic layer.