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  • 专利标题:   Carbon nano cluster film useful in emitter material for FE display and as protective coat for photo-lithography etc., comprises multiple clusters constructed with number of graphene sheets formed on board.
  • 专利号:   JP2003095627-A
  • 发明人:   HIRONO S, UMEMURA S, TOMITA M
  • 专利权人:   NTT AFTY CORP, NIPPON TELEGRAPH TELEPHONE CORP
  • 国际专利分类:   C01B031/02, C23C014/06
  • 专利详细信息:   JP2003095627-A 03 Apr 2003 C01B-031/02 200377 Pages: 5 Japanese
  • 申请详细信息:   JP2003095627-A JP289288 21 Sep 2001
  • 优先权号:   JP289288

▎ 摘　　要

NOVELTY - A carbon nano cluster film comprises multiple clusters constructed with number of graphene sheets, formed on a board. USE - Useful in emitter material for FE display and as protective coat for photo-lithography board and semiconductor devices such as LSI. ADVANTAGE - The carbon nano cluster (CNC) film has excellent physical properties hence, handling is easy. The CNC film has excellent antiwear quality, hence can be used as protective coat. The film has excellent electro conductivity, hence can be utilized in emitter material for FE display.