▎ 摘　　要

NOVELTY - This utility new type belongs to new material technology field, claims a one time by a high temperature annealing preparation graphene up silicon carbide substrate use of quartz heating cavity, the heating cavity is a quartz corresponding of graphite bucket is placed in the inner cavity, of using conventional radio frequency heating method for the heating a graphite, include the heating cavity is provided with a hollow interlayer of inner upper opening cavity and a top cover, the top cover up. with a temperature measuring window and an air inlet, the bottom of the cavity with a temperature measuring window and an air outlet,. inner cavity insulating layer., heat preservation layer middle part is a groove, the bottom of the cavity of temperature measurement window. insulating layer with the groove through connecting, using quartz heating cavity of the a structure, it can use normal of radio frequency heating device for a inner cavity of a heating, the heating efficiency is high, heat loss, and obtain temperature field of more uniformity, through the high temperature annealing preparation graphene by using up the silicon carbide substrate, improves the purity of graphite, saves the production cost and improves the production efficiency.