▎ 摘 要
NOVELTY - The altimeter has a packaging end cover (2) arranged at a top end of a packaging shell (10). The packaging end cover is formed as a plate-type structure. The packaging end cover is formed with a through-hole structure such that the package end cover and the package shell jointly define a containing space. A substrate (29) is arranged on a bottom inner side of the packaging shell. Sealing rings (5, 6) are arranged on an upper surface of the substrate along horizontal direction. A detection unit is arranged on the sealing rings. An interconnection assembly is connected to the detection unit to derive an electrical response in the detection unit. USE - Flip-chip structure based graphene altimeter. ADVANTAGE - The altimeter has high working reliability, sensitivity and accuracy, and can make that a backside is etched into a silicon cup structure to form a flip-chip structure to contact an outside so as to avoid direct contact between graphene and the outside to work stably in various complex environments with high repeatability. DESCRIPTION OF DRAWING(S) - The drawing shows a side sectional view of a flip-chip structure based graphene altimeter. (Drawing includes non-English language text) Packaging end cover (2) Sealing rings (5, 6) Packaging shell (10) Oxygen-free cavity (26) Substrate (29)