• 专利标题:   Flip-chip structure based graphene altimeter, has detection unit arranged on sealing rings, and interconnection assembly connected to detection unit to derive electrical response in detection unit.
  • 专利号:   CN111351470-A, CN211904112-U
  • 发明人:   WANG J, LI M, XIE C
  • 专利权人:   UNIV NORTH CHINA
  • 国际专利分类:   G01C005/06
  • 专利详细信息:   CN111351470-A 30 Jun 2020 G01C-005/06 202059 Pages: 10 Chinese
  • 申请详细信息:   CN111351470-A CN10315848 21 Apr 2020
  • 优先权号:   CN10315848, CN20600740

▎ 摘  要

NOVELTY - The altimeter has a packaging end cover (2) arranged at a top end of a packaging shell (10). The packaging end cover is formed as a plate-type structure. The packaging end cover is formed with a through-hole structure such that the package end cover and the package shell jointly define a containing space. A substrate (29) is arranged on a bottom inner side of the packaging shell. Sealing rings (5, 6) are arranged on an upper surface of the substrate along horizontal direction. A detection unit is arranged on the sealing rings. An interconnection assembly is connected to the detection unit to derive an electrical response in the detection unit. USE - Flip-chip structure based graphene altimeter. ADVANTAGE - The altimeter has high working reliability, sensitivity and accuracy, and can make that a backside is etched into a silicon cup structure to form a flip-chip structure to contact an outside so as to avoid direct contact between graphene and the outside to work stably in various complex environments with high repeatability. DESCRIPTION OF DRAWING(S) - The drawing shows a side sectional view of a flip-chip structure based graphene altimeter. (Drawing includes non-English language text) Packaging end cover (2) Sealing rings (5, 6) Packaging shell (10) Oxygen-free cavity (26) Substrate (29)