• 专利标题:   Graphene/non-polar gallium nitride UV polarization detector used in e.g. civil use, has graphene layer that is not coated with titanium/gold metal electrode layer, and is covered on graphene layer on isolation layer.
  • 专利号:   CN115411132-A
  • 发明人:   LIN T, WANG W
  • 专利权人:   UNIV SOUTH CHINA TECHNOLOGY
  • 国际专利分类:   G01J004/00, H01L031/0224, H01L031/0336, H01L031/109, H01L031/18
  • 专利详细信息:   CN115411132-A 29 Nov 2022 H01L-031/109 202302 Chinese
  • 申请详细信息:   CN115411132-A CN11039319 29 Aug 2022
  • 优先权号:   CN11039319

▎ 摘  要

NOVELTY - Graphene/non-polar gallium nitride ultraviolet polarization detector comprises a substrate arranged from bottom to top, a sequentially buffer layer, a non-Polar GaN layer and a titanium/aluminum metal electrode layer, and an isolation layer covered on the non-nolar Gallium nitrate layer, graphene layer and an Au-metal electrode layer. The barrier layer is a non -polar GaN layer, where the Ti/Au metal electrode layers is covered on one side of the non-polar GaN layer, the isolation layer covers on the other side of non -graphene layer. The graphene layer is not coated with the titanium/gold metal electrode layer, and is covered on the graphene layer on the isolation layer. USE - Graphene/non-polar GaN ultraviolet polarization detector used for civil use, industrial manufacturing, aerospace, national defense and military industry. ADVANTAGE - The graphene has good light transmittance, good conductivity, and non-polar GaN heterojunction can form a built-in electric field, promoting carrier separation, improving the response performance of the device, at the same time of realizing ultraviolet polarized light detection, and improving the photocurrent and the response degree of device, reducing the dark current and noise of device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a preparation method of graphene/non-polar GaN ultraviolet polarization detector. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of graphene non-polar GaN ultraviolet polarization detector. 1Substrate 2Buffer layer 3Non-polar gan layer 4Ti electrode layer 5Isolation layer 6Graphene layer 7Au metal electrode layer