• 专利标题:   Flexible graphene micro-structure for micro-nano system used in research field, has graphite layers that are grown on upper surface of upper zinc oxide nano-wire layers and leading-out electrode layers including gold and copper layers.
  • 专利号:   CN103787259-A
  • 发明人:   PENG B, WU Z, LOU L, PAN Q
  • 专利权人:   UNIV XIDIAN
  • 国际专利分类:   B81B001/00, B81C001/00, B81C003/00
  • 专利详细信息:   CN103787259-A 14 May 2014 B81B-001/00 201446 Pages: 11 Chinese
  • 申请详细信息:   CN103787259-A CN10036412 26 Jan 2014
  • 优先权号:   CN10036412

▎ 摘  要

NOVELTY - The micro-structure has main structure divided into two portions including first and second structures that are fixed with each other and are provided with first and second flexible substrates (11,12) respectively. The first and second graphite layers (21,22) are grown on upper surface of first upper zinc oxide nano-wire layer (4) and second upper zinc oxide nano-wire layer and first and second leading-out electrode layers (31,32) respectively. The leading-out electrode layers are provided with gold layer and copper layer. The flexible substrates are located on outermost layer. USE - Flexible graphene micro-structure for micro-nano system used in research field. ADVANTAGE - The flexible graphene micro-structure can be manufactured effectively with improved piezoelectric property at reduced cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing flexible graphene micro-structure. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating the process of manufacturing flexible graphene micro-structure. First upper zinc oxide nano-wire layer (4) Flexible substrates (11,12) Graphite layers (21,22) Leading-out electrode layers (31,32)