• 专利标题:   Flexible graphene plasma exciting component, comprises orderly from up to down flexible substrate, graphene layer, source electrode, drain electrode metal layer and dielectric layer, where graphene layer is covered on flexible substrate.
  • 专利号:   CN108389930-A
  • 发明人:   DAI Q, HU H, YANG X, GUO X, HU D
  • 专利权人:   NAT CENT NANOSCIENCE TECHNOLOGY CHINA
  • 国际专利分类:   H01L031/0236, H01L031/101, H01L031/18
  • 专利详细信息:   CN108389930-A 10 Aug 2018 H01L-031/101 201861 Pages: 11 Chinese
  • 申请详细信息:   CN108389930-A CN10113355 05 Feb 2018
  • 优先权号:   CN10113355

▎ 摘  要

NOVELTY - A flexible graphene plasma exciting component comprises orderly from up to down a flexible substrate, a graphene layer, source electrode, a drain electrode metal layer and a dielectric layer, where the graphene layer is covered on the flexible substrate, the source and drain metal layer is deposited on the graphene layer, the source electrode and drain electrode metal layer for graphene conduction, the dielectric layer is located above the graphene layer, the graphene layer and source electrode and drain electrode metal layer are sandwiched between a dielectric layer, similar to a parallel plate capacitor structure, the local area of the source electrode and the drain electrode metal layer of the graphene layer are set with periodical micro-nano structure. USE - Flexible graphene plasma exciting component. ADVANTAGE - The flexible graphene plasma exciting component can be prepared with flexible function, better plasmonic stability and better durability. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for preparing flexible graphene plasma exciting component.