• 专利标题:   Transferring CVD graphene device preparing method for carbon-based integrated circuit manufacturing field, involves performing substrate cleaning process, polishing substrate surface, and performing surface impurity removing process.
  • 专利号:   CN103915319-A
  • 发明人:   YANG S, ZHOU P, SHEN Y
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   H01L021/02
  • 专利详细信息:   CN103915319-A 09 Jul 2014 H01L-021/02 201465 Pages: 7 Chinese
  • 申请详细信息:   CN103915319-A CN10157128 19 Apr 2014
  • 优先权号:   CN10157128

▎ 摘  要

NOVELTY - The method involves fixing a supply silicon dioxide substrate with a mask plate. Physical vapor deposition process is performed. The silicon dioxide substrate is formed with a copper thin film. The silicon dioxide substrate is fixed by a gold electrode. Graphite material is coated on an electrode device. Removed copper substrate cleaning process is performed by using ammonium sulfate solution. Silicon dioxide substrate surface is polished. Surface impurity removing process is performed. USE - Transferring CVD graphene device preparing method for a carbon-based integrated circuit manufacturing field. ADVANTAGE - The method enables preparing CVD graphene in a simple, convenient and reliable manner, avoiding spin coating PMMA, reducing injury of graphene device and reducing electrode contact resistance effect. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a transferring CVD graphene device preparing method. '(Drawing includes non-English language text)'