• 专利标题:   Preparation of graphene/transparent target substrate comprises growing graphene on copper foil, binding into transparent target substrate, scanning irradiating side of transparent substrate surface, and removing copper foil.
  • 专利号:   CN105036118-A, CN105036118-B
  • 发明人:   LIU S, ZHENG H, FU X, LIU Y, CHEN Q
  • 专利权人:   UNIV WUHAN, WUHAN FINEMEMS INC, WUHAN FINEMEMS INC
  • 国际专利分类:   C01B031/04, C01B032/19
  • 专利详细信息:   CN105036118-A 11 Nov 2015 C01B-031/04 201611 Pages: 6 Chinese
  • 申请详细信息:   CN105036118-A CN10359627 25 Jun 2015
  • 优先权号:   CN10359627

▎ 摘  要

NOVELTY - Preparation of graphene/transparent target substrate comprises growing graphene on copper foil; binding into transparent target substrate; and using femtosecond laser scanning irradiation to side of the transparent substrate surface and removing copper foil. USE - Method for preparing graphene/transparent target substrate (claimed). ADVANTAGE - The method has improved accuracy and efficiency of laser peeling, effectively reduces thermal stress of graphene and carrier substrate, and has improved quality of peeling.