• 专利标题:   Sensor for measuring vacuum by utilizing vacuum gauge, has main body for utilizing graphene when curvature degree is generated in ambient pressure of section for amount inter-molecular attraction of air between graphene layer and vacuum.
  • 专利号:   KR1655033-B1
  • 发明人:   AHN S I, JUNG J R, YONG W K
  • 专利权人:   UNIV SILLA
  • 国际专利分类:   G01L021/00, G01L009/00
  • 专利详细信息:   KR1655033-B1 06 Sep 2016 201663 Pages: 13
  • 申请详细信息:   KR1655033-B1 KR078683 03 Jun 2015
  • 优先权号:   KR078683

▎ 摘  要

NOVELTY - The sensor has a main body formed with a graphene thin film and measuring an inter-layer space from X-ray diffraction measurement. The inter-layer space is greater than 0.335nm. The graphene thin film is made of reduction graphene, and polymer (12). The main body senses degree of vacuum by detecting a resistance value changing according to curvature degree of the graphene layer. The main body utilizes graphene (11) when curvature degree is generated in the ambient pressure of a high vacuum section for amount inter-molecular attraction of air between the graphene layer and vacuum. USE - Sensor for measuring vacuum by utilizing a vacuum gauge (claimed). ADVANTAGE - The sensor detects a resistance value according to the curvature degree of the graphene layer, senses degree of vacuum, detects change of the electrical resistance value, and facilitates measurement of the precision vacuum with small size. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a vacuum gauge. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a vacuum measuring sensor. Graphene (11) Polymer (12) Gas (13)