▎ 摘 要
NOVELTY - The sensor has a main body formed with a graphene thin film and measuring an inter-layer space from X-ray diffraction measurement. The inter-layer space is greater than 0.335nm. The graphene thin film is made of reduction graphene, and polymer (12). The main body senses degree of vacuum by detecting a resistance value changing according to curvature degree of the graphene layer. The main body utilizes graphene (11) when curvature degree is generated in the ambient pressure of a high vacuum section for amount inter-molecular attraction of air between the graphene layer and vacuum. USE - Sensor for measuring vacuum by utilizing a vacuum gauge (claimed). ADVANTAGE - The sensor detects a resistance value according to the curvature degree of the graphene layer, senses degree of vacuum, detects change of the electrical resistance value, and facilitates measurement of the precision vacuum with small size. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a vacuum gauge. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a vacuum measuring sensor. Graphene (11) Polymer (12) Gas (13)