▎ 摘　　要

NOVELTY - Preparation of high-stability graphene nanopores involves preparing high-quality graphene by mechanical exfoliation method, transferring to a silicon nitride chip with pores to form a graphene suspended membrane structure, precisely controlling the defect density in the graphene suspended membrane by oxygen plasma etching, so that the nanopore grows depending on the defect, reducing the breakdown voltage of the graphene film by irradiating the target area with pulsed light, and crushing the film by setting increasing pulse current. USE - The method is useful for preparing high-stability graphene nanopores, and two-dimensional nanopores of molybdenum disulfide, tungsten diselenide, and black phosphorus, for use in super-sensitive molecular biosensors and efficient ion filters. ADVANTAGE - The method provides graphene nanopores, which have high controllability in size, minimum breakdown diameter of 1 nm or less, a maximum control accuracy of pore size of 0.5 nm, a maximum control accuracy of the pore length of 0.34 nm, and improved pore size stability compared with traditional solid nanopores, and can still maintain good structural consistency during immersion test for up to 1 month. The daily increase in pore size of graphene is less than 0.7% when soaked in 1 M potassium chloride solution with pH of 8.