• 专利标题:   Vapor-deposited graphene layer growth preparation device comprises high-vacuum sealing plug-in valve transversely arranged on upper part of sealed cavity near top, thermal field base fixedly installed at bottom of sealed cavity.
  • 专利号:   CN112813408-A, CN215481249-U
  • 发明人:   ZHAO B, FU S, ZHANG H
  • 专利权人:   SHANGHAI LANYUE NEW MATERIAL TECHNOLOGY CO LTD, SHANGHAI LANYUE NEW MATERIAL TECHNOLOGY
  • 国际专利分类:   C23C016/26, C23C016/44, C23C016/455, C30B025/08, C30B025/10, C30B025/14, C30B029/02
  • 专利详细信息:   CN112813408-A 18 May 2021 C23C-016/26 202148 Pages: 11 Chinese
  • 申请详细信息:   CN112813408-A CN10193070 20 Feb 2021
  • 优先权号:   CN10193070, CN20381889

▎ 摘  要

NOVELTY - Vapor-deposited graphene layer growth preparation device comprises sealed cavity (18), high-vacuum sealing plug-in valve (17) is transversely arranged on the upper part of the sealed cavity near the top, a thermal field base is fixedly installed at the bottom of the sealed cavity, cylindrical graphite hard felt insulation layer (19) is fixedly connected to the top of the thermal field base, a first graphite heating element and a second graphite heating element are fixedly installed on the inner wall of the graphite hard felt insulation layer, the top of the thermal field base is provided with a through hole for fixedly connecting the silicon carbide ceramic air inlet pipe, silicon carbide ceramic tray is arranged above the graphite hard felt insulation layer, the silicon carbide ceramic tray is equidistantly arranged along the circumferential direction with a plurality of clamping grooves (14) that are matched with the top of the graphite hard felt insulation layer. USE - UIsed as vapor-deposited graphene layer growth preparation device. ADVANTAGE - The device: ensures standardization and controllability of the process and the replicability. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for vapor-deposited graphene layer growth preparation process. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the vapor-deposited graphene layer growth preparation device. Clamping grooves (14) High-vacuum sealing plug-in valve (17) Sealed cavity (18) Graphite hard felt insulation layer (19)