• 专利标题:   Method for making homoepitaxial tunnel barrier transport device, involves fluorinating graphene film, and performing fluorination to fluorinate device to form tunnel barrier transport device with functionalized graphene-on-graphene.
  • 专利号:   US2015303059-A1, US9614063-B2
  • 发明人:   FRIEDMAN A L, JONKER B T, LI C H, ROBINSON J T, VAN T ERVE O M T, VAN T ERVE O M T
  • 专利权人:   US SEC OF NAVY, FRIEDMAN A L, JONKER B T, LI C H, ROBINSON J T, US SEC OF NAVY, VAN T ERVE O M T
  • 国际专利分类:   H01L021/02, H01L021/285, H01L021/308, H01L029/16, H01L029/45, H01L029/66, H01L029/423
  • 专利详细信息:   US2015303059-A1 22 Oct 2015 H01L-021/02 201573 Pages: 10 English
  • 申请详细信息:   US2015303059-A1 US629939 24 Feb 2015
  • 优先权号:   US980448P, US629939

▎ 摘  要

NOVELTY - The method involves transferring a monolayer graphene film on top of a partial device. A layer of PMMA is spin-coated onto the monolayer graphene film. A mesa pattern is defined by using photolithography in the layer of photoresist. Renches are defined to deposit ferromagnetic contacts by electron beam deposition and lift-off. The monolayer graphene film is fluorinated. Fluorination is performed to fluorinate the device to form a homoepitaxial tunnel barrier transport device with functionalized graphene-on-graphene. USE - Method for making a homoepitaxial tunnel barrier transport device with functionalized graphene-on-graphene. ADVANTAGE - The method enables observing non-local hanle effect and a non-local spin valve to provide strong evidence to support spin injection, transport and detection in a graphene channel. The method allows true electron tunneling with lower impedance and loss in an effective manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a homoepitaxial tunnel barrier transport device with functionalized graphene-on-graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a photograph of an optical image of a device with fluorination.