• 专利标题:   Method for transferring graphene sheet from copper substrate to functional substrate, involves submerging functional substrate in floating bath, and decreasing fluid level of floating bath to lower graphene sheet onto substrate.
  • 专利号:   US2017298504-A1, WO2017180137-A1, TW201803805-A, US10017852-B2, CA3020686-A1, SG11201808962-A1, EP3442739-A1, KR2019019907-A, JP2019511451-W
  • 发明人:   HEISE S E, BEDWORTH P V, SWETT J L, SINTON S W
  • 专利权人:   LOCKHEED MARTIN CORP, LOCKHEED MARTIN CORP, LOCKHEED MARTIN CORP
  • 国际专利分类:   C23C016/26, C23F001/14, B01J019/08, C01B031/04, C01B032/182, C01B032/186, C23C016/01, C23C016/56, C23F001/18, C01B032/21, B23K015/08, B41M005/03, B41M005/10, C01B032/194
  • 专利详细信息:   US2017298504-A1 19 Oct 2017 C23C-016/26 201772 Pages: 14 English
  • 申请详细信息:   US2017298504-A1 US099464 14 Apr 2016
  • 优先权号:   EP898822, US099464, WOUS027623, CA3020686

▎ 摘  要

NOVELTY - The method involves forming a graphene sheet on a copper substrate (10) using chemical vapor deposition. The graphene sheet formed on the copper substrate is irradiated with multiple xenon ions using broad beam irradiation to form a prepared graphene sheet. The copper substrate is removed from the prepared graphene sheet using an etchant bath. The prepared graphene sheet is floated in a floating bath. The functional substrate is submerged in the floating bath. A fluid level of the floating bath is decreased to lower the prepared graphene sheet onto the functional substrate. USE - Method for transferring graphene sheet from copper substrate to functional substrate. ADVANTAGE - The need of secondary coating materials is eliminated to aid in the transfer of the graphene sheet to the functional substrate, so that the risk of lowering the quality of the graphene sheet through contaminants introduced by the use of secondary coating materials is eliminated. The prepared graphene sheet does not show visible defects such as visible tear, crack or wrinkles within the main portion of the sheet even after the free-float and lowering of the graphene sheet onto the functional substrate without the use of secondary polymer support materials. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic perspective view of the growth substrate used in the formation of graphene sheet. Copper substrate (10)