• 专利标题:   Formation of patterned graphene or graphitic layer involves providing three-dimensionally patterned carbonaceous portion, coating portion with catalytic metal and annealing coated portion.
  • 专利号:   US9533887-B1
  • 发明人:   POLSKY R, XIAO X, BURCKEL D B, WHEELER D R, BROZIK S M, BEECHEM T E
  • 专利权人:   SANDIA CORP
  • 国际专利分类:   B05D005/00
  • 专利详细信息:   US9533887-B1 03 Jan 2017 B05D-005/00 201707 Pages: 14 English
  • 申请详细信息:   US9533887-B1 US790524 08 Mar 2013
  • 优先权号:   US790524

▎ 摘  要

NOVELTY - Formation of graphene or graphitic layer involves providing a three-dimensionally patterned carbonaceous portion, coating (50) the portion with a catalytic metal to form a coating having an inner surface proximal portion and an outer surface distal portion and annealing (60) the coated portion to form graphene or graphite layer on the outer surface of the catalytic metal coating. USE - Formation of graphene or graphitic layer (claimed). DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart for making graphene or graphitic carbon article. Photoresist deposition process (10) Patterning process (20) Coating of pattern with catalytic metal (50) Annealing process (60) Etching process (70)