• 专利标题:   Production system for producing graphene by plasma-enhanced chemical vapor deposition, has carbonaceous electrode that is electrically connected with reel-to-reel processing line to apply potential between metal substrate and electrode.
  • 专利号:   US2016102402-A1
  • 发明人:   SINTON S W, BEDWORTH P V
  • 专利权人:   LOCKHEED MARTIN CORP
  • 国际专利分类:   C23C016/455, C23C016/505
  • 专利详细信息:   US2016102402-A1 14 Apr 2016 C23C-016/505 201628 Pages: 7 English
  • 申请详细信息:   US2016102402-A1 US971922 16 Dec 2015
  • 优先权号:   US192796, US971922

▎ 摘  要

NOVELTY - The system (10) has a reel-to-reel processing line that conveys a metal substrate (14) within a reaction chamber (12) between a pay-out reel (16) and a take-up reel (18). A carbonaceous electrode (22) is housed within the reaction chamber and disposed proximate to a location through which the metal substrate is conveyed. The carbonaceous electrode is electrically connected with the processing line to apply a potential between the metal substrate and the carbonaceous electrode. A gas inlet (28) flows a plasma-forming gas in a gap (26) between the metal substrate and the carbonaceous electrode. USE - Production system for producing graphene by plasma-enhanced chemical vapor deposition. ADVANTAGE - The carbonaceous electrode is disposed in close proximity to the substrate, which decreases incidence of premature recombination of the reactive carbon species and increases graphene production. The plasma energy is alternately directed onto the metal substrate and the carbonaceous electrode to provide energetic enhancement to both. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of the production system for producing graphene by plasma-enhanced chemical vapor deposition. Production system (10) Reaction chamber (12) Metal substrate (14) Pay-out reel (16) Take-up reel (18) Carbonaceous electrode (22) Gap (26) Gas inlet (28)