▎ 摘 要
NOVELTY - The system (10) has a reel-to-reel processing line that conveys a metal substrate (14) within a reaction chamber (12) between a pay-out reel (16) and a take-up reel (18). A carbonaceous electrode (22) is housed within the reaction chamber and disposed proximate to a location through which the metal substrate is conveyed. The carbonaceous electrode is electrically connected with the processing line to apply a potential between the metal substrate and the carbonaceous electrode. A gas inlet (28) flows a plasma-forming gas in a gap (26) between the metal substrate and the carbonaceous electrode. USE - Production system for producing graphene by plasma-enhanced chemical vapor deposition. ADVANTAGE - The carbonaceous electrode is disposed in close proximity to the substrate, which decreases incidence of premature recombination of the reactive carbon species and increases graphene production. The plasma energy is alternately directed onto the metal substrate and the carbonaceous electrode to provide energetic enhancement to both. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of the production system for producing graphene by plasma-enhanced chemical vapor deposition. Production system (10) Reaction chamber (12) Metal substrate (14) Pay-out reel (16) Take-up reel (18) Carbonaceous electrode (22) Gap (26) Gas inlet (28)