• 专利标题:   Method for preparing low-dimensional material heterojunction photoelectric detector involves depositing metal material layer on two sides of low-dimensional material hetero-junction film to form positive electrode and negative electrode.
  • 专利号:   CN113270517-A, CN113270517-B
  • 发明人:   JIANG Q, BAI Y, ZHANG Y, JI R, ZHOU G
  • 专利权人:   HUAIYIN TECHNOLOGY INST
  • 国际专利分类:   H01L031/0232, H01L031/109, H01L031/18
  • 专利详细信息:   CN113270517-A 17 Aug 2021 H01L-031/109 202171 Pages: 8 Chinese
  • 申请详细信息:   CN113270517-A CN10402093 17 Jan 2020
  • 优先权号:   CN10053655, CN10402093

▎ 摘  要

NOVELTY - The method involves depositing a low refractive index material layer on an optical waveguide (2). A molybdenum disulfide thin film material layer is transferred on an upper surface of the optical waveguide. A sheet boron nitride thin film material layer and a black scale film material layer are mechanically transferred to an upper surface of the molybdenum disulfide thin film material layer. A metal material layer is deposited on two sides of a low-dimensional material heterojunction film (5) to form a positive electrode (6) and a negative electrode (7). The graphene resistance region forms a first graphene resistance heater (8) and a second graphene resistance heater (9). USE - Method for preparing low-dimensional material heterojunction photoelectric detector integrated with waveguide. ADVANTAGE - The photoelectric detector detects the high power and multi-band optical signal. The response degree of the photoelectric detector is high. The light-electric response bandwidth of the photoelectric detector is large. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the photoelectric detector. (Drawing includes non-English language text) 2Optical waveguide 5Low-dimensional material heterojunction film 6Positive electrode 7Negative electrode 8First graphene resistance heater 9Second graphene resistance heater