• 专利标题:   Quasi-Van der Waals contact structure based two-dimensional semiconductor device, has van der Waals contact structure provided with contact electrode, graphene nanosheet and metal that is stacked and evaporated on graphene nanosheet.
  • 专利号:   CN109037319-A
  • 发明人:   HE J, WANG J, WANG F
  • 专利权人:   NAT CENT NANOSCIENCE TECHNOLOGY CHINA
  • 国际专利分类:   H01L029/47, H01L021/44
  • 专利详细信息:   CN109037319-A 18 Dec 2018 H01L-029/47 201913 Pages: 15 Chinese
  • 申请详细信息:   CN109037319-A CN10609906 13 Jun 2018
  • 优先权号:   CN10609906

▎ 摘  要

NOVELTY - The device has a standard van der Waals contact structure provided with a contact electrode. The standard van der Waals contact structure is provided with a graphene nanosheet and a metal i.e. chromium or palladium metal that is vertically stacked and evaporated on the graphene nanosheet. A lateral conduction channel is formed with molybdenum telluride nanometer sheet or two selenium tungsten nanosheets. A substrate is formed with the standard van der Waals contact structure, where the substrate is made of silicon dioxide/silicon or hexagonal boron nitride nanosheet. USE - Quasi-Van der Waals contact structure based two-dimensional semiconductor device. ADVANTAGE - The device forms a quasi-van der Waals contact structure with graphene/metal so as to obviously reduce Schottky barrier of a carrier device, exhibits heat-assisted field emission activation energy carriers so as to improve performance. The device improves verification performance, and increases manufacturing effectiveness. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a quasi-Van der Waals contact structure based two-dimensional semiconductor device manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a quasi-Van der Waals contact structure based two-dimensional semiconductor device. '(Drawing includes non-English language text)'