▎ 摘　　要

NOVELTY - Preparation of lithium phosphorus oxynitride (LiPON) solid-state electrolyte-based lithium ion capacitor comprises setting up a layer of silicon substrate, depositing aluminum layer current collector by reactive magnetron sputtering, depositing a graphene layer through reactive magnetron sputtering, depositing LiPON electrolyte layer through reactive magnetron sputtering, depositing graphene layer through reactive magnetron sputtering, and depositing aluminum layer current collector through reactive magnetron sputtering. USE - The method is for preparation of lithium phosphorus oxynitride solid-state electrolyte-based lithium ion capacitor. ADVANTAGE - The lithium ion capacitor has high specific energy and fast response, high ion conductivity, good safety and long cycle life, high specific surface area of graphite, high conductivity and high ion mobility, and good wetting property.