• 专利标题:   Semiconductor wafer transporting carrier comprises frame which comprises opening unit and stores and transports multiple wafers which have been loaded through opening unit.
  • 专利号:   WO2021210752-A1, KR2021128550-A, KR2342156-B1
  • 发明人:   CHANG D J, LEE S W, JANG D J
  • 专利权人:   GLINT MATERIALS CO LTD
  • 国际专利分类:   H01L021/673, B65D085/30
  • 专利详细信息:   WO2021210752-A1 21 Oct 2021 202194 Pages: 21
  • 申请详细信息:   WO2021210752-A1 WOKR018287 14 Dec 2020
  • 优先权号:   KR046111

▎ 摘  要

NOVELTY - Semiconductor wafer transporting carrier (100) comprises a frame (110) which comprises an opening unit and stores and transports multiple wafers which have been loaded through the opening unit. One or multiple holders (120) provide support so that the multiple wafers are stacked inside the frame so as to be spaced apart. Attachment/detachment unit (130) enables the one or multiple holders to be spaced apart and attached/detached to/from the inside of the frame. Anti-slip pads (140) are mounted on the holders and providing support so as to prevent the wafers from breaking away. USE - Semiconductor wafer transporting carrier. ADVANTAGE - The semiconductor wafer transporting carrier prevents wafers from breaking away by disabling the wafers loaded inside from breaking away from the positions, and thus improves process stability. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view carrier for transferring semiconductor wafers. Semiconductor wafer transporting carrier (100) Frame (110) Holders (120) Attachment/detachment unit (130) Anti-slip pads (140)