• 专利标题:   Electronic system comprises semiconductor device including semiconductor device structure comprising 2D material structure including stack having substantially crystalline-defect-free forms of carbide and carbonitride, and peripheral circuitry electrically connected to semiconductor device.
  • 专利号:   US2022344160-A1
  • 发明人:   PANDEY S C, MEADE R E
  • 专利权人:   MICRON TECHNOLOGY INC
  • 国际专利分类:   H01L021/02, H01L021/268, H01L021/428, H01L021/477, H01L029/06
  • 专利详细信息:   US2022344160-A1 27 Oct 2022 H01L-021/268 202288 English
  • 申请详细信息:   US2022344160-A1 US811426 08 Jul 2022
  • 优先权号:   US253454, US811426

▎ 摘  要

NOVELTY - Electronic system (300) comprises at least one semiconductor device including at least one semiconductor device structure comprising a 2D material structure including a stack having substantially crystalline-defect-free forms of two or more of at least one carbide and at least one carbonitride, and peripheral circuitry electrically connected to the at least one semiconductor device. USE - Electronic system. ADVANTAGE - The 2D material structure exhibits reduced crystalline defects as compared to conventional 2D material structures having the same 2D material composition (e.g., formed of and including the same 2D material(s)) but formed through conventional processes. The 2D material structure exhibits a reduced density of interstitial defects and/or vacancy defects as compared to conventional 2D material structures having the same 2D material composition. The semiconductor device structures have enhanced performance, reliability, and durability. DETAILED DESCRIPTION - Electronic system comprises at least one semiconductor device including at least one semiconductor device structure comprising a 2D material structure including a stack having substantially crystalline-defect-free forms of two or more of at least one carbide and at least one carbonitride of formula Mn+1Xn, where M is a transition metal from Group IV or Group V of the Periodic Table of Elements; and X is one or more of C and N; and peripheral circuitry electrically connected to the at least one semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic block diagram of an electronic system. 300Electronic system 302Memory device 304Electronic signal processor device 306Input devices 308Output device