• 专利标题:   Silicon stone graphene field effect transistor, has source region and drain region arranged on graphite layer, channel arranged between source region and drain region, and low resistivity silicon layer arranged on silicon carbide substrate.
  • 专利号:   CN102569407-A
  • 发明人:   CHEN Z, KUANG W, LIU X, TANG Z
  • 专利权人:   BEIJING ZHONGRUI JINGWEI TECHNOLOGY CO
  • 国际专利分类:   H01L021/04, H01L029/78
  • 专利详细信息:   CN102569407-A 11 Jul 2012 H01L-029/78 201260 Pages: 5 Chinese
  • 申请详细信息:   CN102569407-A CN10033024 14 Feb 2012
  • 优先权号:   CN10033024

▎ 摘  要

NOVELTY - The transistor has a gate electrode whose top part is provided with a wearable low-resistance silicon layer. A gate oxide layer is adhered to a graphite layer. A source region and a drain region are arranged on the graphite layer. A channel is arranged between the source region and the drain region. A low resistivity silicon layer is arranged on a silicon carbide substrate. A graphene-containing layer is provided with a silicon carbide film. The graphene-containing layer is made of a two-dimensional crystal material. USE - Silicon stone graphene field effect transistor (FET). DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing a silicon stone graphene field effect transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a silicon stone graphene field effect transistor.