• 专利标题:   Preparation of high-quality graphene film, involves placing quartz rod between substrates, placing growth substrate in chemical vapor deposition tubular furnace, annealing, introducing carbon source gas, and growing graphene.
  • 专利号:   CN112265984-A
  • 发明人:   ZHANG Y, LI Z, HUANG D, JIANG H, SHI H
  • 专利权人:   CHINESE ACAD SCI CHONGQING GREEN INTEL, UNIV CHONGQING
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN112265984-A 26 Jan 2021 C01B-032/186 202116 Pages: 8 Chinese
  • 申请详细信息:   CN112265984-A CN11194328 30 Oct 2020
  • 优先权号:   CN11194328

▎ 摘  要

NOVELTY - Preparation of high-quality graphene film, involves vertically placing N-substrates, placing a quartz rod between the substrates to form confinement channel structures without adhesion between the substrates at high temperature, placing the growth substrate in a chemical vapor deposition tubular furnace, introducing a gas for high-temperature annealing pretreatment, introducing a carbon source gas, in-situ growing graphene on the substrate, stopping introduction of carbon source gas after growth is completed, continuously introducing the gas until it is cooled to normal temperature, and taking out. USE - Preparation of high-quality graphene film (claimed). ADVANTAGE - The method reduces roughness of substrate surface and nucleation density of the substrate surface, creates good condition for the growth of high-quality graphene, and enables batch processing.