▎ 摘　　要

NOVELTY - Graphene composite pressure sensitive film structure based on flexible polarization enhanced force electric coupling mechanism comprises a silicon/silica substrate provided with a back cavity and the silicon/silicon dioxide substrate is sputtered with a platinum/titanium metal layer (3). A piezoelectric ferroelectric film (4) is sputtered on the metal layer of platinum/titanium, a graphene film (5) is formed on the piezoelectric ferroelectric film, and metal electrodes (6) are sputtered on both sides of the graphene film. A package substrate is installed on the back of the silicon/silicon dioxide substrate. USE - The structure is useful in nanoelectromechanical systems (NEMS) micro-pressure sensitive sensing design field. ADVANTAGE - The structure has high-sensitivity power electric coupling, and is capable of changing the carrier transport condition of the graphene thin film by using the polarization voltage of the ferroelectric thin film to change the carrier transportation condition. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the piezoelectric-based graphene composite pressure-sensitive film structure based on flexoelectric polarization-enhanced electromechanical coupling mechanism in NEMS micro-pressure sensitive sensing design field (Drawing includes non-English language text). 3Platinum/titanium metal layer 4Piezoelectric ferroelectric film 5Graphene film 6Metal electrode