▎ 摘 要
NOVELTY - Method for producing biosensor, involves (a) forming the patterned convex portion on one side of substrate, (b) obtaining the graphene layer by forming patterns on the substrate and growing graphene directly on the substrate by plasma enhanced chemical vapor deposition (PECVD) method, (c) separating the substrate and graphene layer using a bonding member, and arranging the separated graphene layer in the supporting unit, (d) processing the surface of the graphene layer, and (e) combining the detection unit with the resonant unit comprising the functional group. USE - The method is useful for producing biosensor (all claimed). ADVANTAGE - The method enables to provide biosensor capable of detecting target substance without separate labeling process. DETAILED DESCRIPTION - Method for producing biosensor, involves (a) forming the patterned convex portion on one side of substrate, (b) obtaining the graphene layer by forming patterns on the substrate using hydrocarbon gas as a carbon source and growing graphene directly on the substrate by plasma enhanced chemical vapor deposition (PECVD) method, (c) separating the substrate and graphene layer using a bonding member, and arranging the separated graphene layer in the supporting unit to form a hollow structure between the supporting unit and graphene layer, (d) processing the surface of the graphene layer with a surface treating agent comprising functional group on surface exposing to the outside of the graphene layer to form a resonance unit, and (e) combining the detection unit with the resonant unit comprising the functional group.