• 专利标题:   Producing a graphene to make transparent electrode of e.g. optical detector, comprises depositing catalyst on substrate, heating substrate by vapor deposition of carbon contained in catalyst, cooling heated substrate and etching.
  • 专利号:   KR2013101391-A, KR1350263-B1
  • 发明人:   SONG Y W, LIM J A, KANG D S, KIM W J
  • 专利权人:   KOREA INST SCI TECHNOLOGY
  • 国际专利分类:   C01B031/02, C23C016/26, H01L021/08
  • 专利详细信息:   KR2013101391-A 13 Sep 2013 C01B-031/02 201377 Pages: 15
  • 申请详细信息:   KR2013101391-A KR022507 05 Mar 2012
  • 优先权号:   KR022507

▎ 摘  要

NOVELTY - Producing a graphene comprises: depositing a catalyst on a substrate; heating the catalyst substrate by vapor deposition of carbon contained in the catalyst through the grain boundaries of the catalyst substrate and interlayer diffusion of the catalyst to form crystals without using an artificial carbon source; cooling the heated substrate after diffusion of carbon; and etching the catalyst. USE - The method is useful for producing graphene (claimed) that is used to make a transparent electrode and a metal semiconductor junction of electronic devices (all claimed) such as a femto-second laser and optical detector. ADVANTAGE - The method is capable of producing high purity graphene without using metal deposition process, carbon source material and using the additional metallic catalysts. The catalyst deposition and graphene synthesis are performed in the metal evaporator so as to remove the additional contamination during graphene production.