• 专利标题:   Graphene transistor e.g. graphene FET for electronic device, has carbon film whose width of side near source electrode of channel region is wider than width of carbon film of side near drain electrode of channel region.
  • 专利号:   JP2009182173-A
  • 发明人:   HARADA N
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   H01L021/331, H01L029/06, H01L029/73, H01L029/737, H01L029/786
  • 专利详细信息:   JP2009182173-A 13 Aug 2009 H01L-029/06 200954 Pages: 14 Japanese
  • 申请详细信息:   JP2009182173-A JP020277 31 Jan 2008
  • 优先权号:   JP020277

▎ 摘  要

NOVELTY - The transistor has a carbon film comprising several graphene films (12) formed in the active region. The width of the carbon film of the side near the source electrode (15) of a channel region in active region is wider than the width of the carbon film of side near the drain electrode (16) of the channel region. USE - Graphene transistor such as n and p channel type graphene FET and npn and pnp type graphene lateral heterojunction bipolar transistor (HBT) for electronic device (claimed). ADVANTAGE - The performance of the transistor and the electronic device are improved, and the characteristic of the channel layer at each place can be optimized. The increase of the effective mass of the transistor can be suppressed. DESCRIPTION OF DRAWING(S) - The drawing shows an explanatory view of the graphene FET. (Drawing includes non-English language text) Insulated substrate (11) Graphene film (12) Gate insulating film (13) Source electrode (15) Drain electrode (16)