• 专利标题:   Method for transferring graphene used in flexible electronic application, involves providing substrate, growing graphene on substrate, forming graphene/substrate structure, coating parylene on graphene and removing substrate.
  • 专利号:   CN108793146-A
  • 发明人:   ZHANG M, GAO M, HAN X, XUE Z, DI Z
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION, UNIV CHINESE ACAD SCI
  • 国际专利分类:   C01B032/194
  • 专利详细信息:   CN108793146-A 13 Nov 2018 C01B-032/194 201906 Pages: 9 Chinese
  • 申请详细信息:   CN108793146-A CN10714966 03 Jul 2018
  • 优先权号:   CN10714966

▎ 摘  要

NOVELTY - The method for transferring graphene involves providing a substrate, growing graphene on the substrate, forming a graphene/substrate structure, coating parylene on the graphene, forming parylene/graphene/substrate structure, removing the substrate in the parylene/graphene/substrate structure with an etching solution to form parylene/graphene structure, flipping parylene/graphene structure, forming graphene/parylene structure, and completing transfer of graphene. USE - Method for transferring graphene used in flexible electronic application (claimed). ADVANTAGE - The method enables transfer of graphene, and obtains high-quality, large-area, non-destructive, and clean graphene by inverting the substrate after only one etching solution.