• 专利标题:   Suspending graphene membrane across gap in support structure, comprises attaching graphene to substrate, attaching pre-fabricated support structure having the gap to graphene, and separating graphene and structure from substrate.
  • 专利号:   US2009291270-A1, US8409450-B2
  • 发明人:   MEYER J C, ZETTL A K
  • 专利权人:   UNIV CALIFORNIA
  • 国际专利分类:   B32B003/10, B44C001/16, B44C001/22, C23C014/30, C03C025/68
  • 专利详细信息:   US2009291270-A1 26 Nov 2009 B44C-001/16 200981 Pages: 15 English
  • 申请详细信息:   US2009291270-A1 US409938 24 Mar 2009
  • 优先权号:   US039002P, US409938

▎ 摘  要

NOVELTY - The method comprises attaching graphene to a substrate, attaching a pre-fabricated support structure having the gap to the graphene, and separating the graphene and the pre-fabricated support structure from the substrate, which leaves the graphene membrane suspended across the gap in the pre-fabricated support structure. The separating of the graphene and the pre-fabricated support structure from the substrate comprises etching the sacrificial surface by immersing the sacrificial surface and the graphene in an etch solution. USE - The method is useful for suspending a graphene membrane across a gap in a support structure, where the suspended membrane of graphene is useful: for nanoelectromechanical devices, high-volume commercial products and specialized research tools such as electron microscopy support; and as a support in transmission electron microscopy imaging, as sensitive chemical detectors, as part of a tuned electromechanical circuit and filter and as a basis for nanoelectronics or nanothermal devices. ADVANTAGE - The method ensures cost effective and efficient suspending of the graphene membrane across the gap in the support structure, where the graphene has high conductivity. DETAILED DESCRIPTION - The method comprises attaching graphene to a substrate, attaching a pre-fabricated support structure having the gap to the graphene, and separating the graphene and the pre-fabricated support structure from the substrate, which leaves the graphene membrane suspended across the gap in the pre-fabricated support structure. The separating of the graphene and the pre-fabricated support structure from the substrate comprises etching the sacrificial surface by immersing the sacrificial surface and the graphene in an etch solution. The pre-fabricated support structure comprises a transmission electron microscopy grid and gaps. The etch solution comprises an organic solvent. The method further comprises separating the graphene from bulk graphite prior to attaching the graphene to the substrate, immersing the graphene and the pre-fabricated support structure in a solvent, which removes excess adhesive, heating the pre-fabricated support structure having the graphene membrane suspended across the gap after separating the pre-fabricated support structure and the graphene membrane from the substrate and separating the graphene and the pre-fabricated support structure from the substrate leaves the graphene membrane suspended across at least two of the gaps in the pre-fabricated support structure. The attaching of the pre-fabricated support structure comprises placing a pre-fabricated support structure having the gap on the graphene, immersing the pre-fabricated support structure and the graphene in a solvent, and evaporating the solvent, which attaches the pre-fabricated support structure to the graphene. The attaching of the graphene to the substrate comprises attaching the graphene to a sacrificial surface of the substrate. The separating of the graphene and the pre-fabricated support structure from the substrate comprises placing a solvent adjacent to an edge of the prefabricated support structure, which expands beneath the prefabricated support structure and the graphene and which causes the pre-fabricated support structure with the graphene membrane suspended across the gap to release from the substrate. The attaching of the prefabricated support structure to the graphene comprises applying an adhesive to a surface of the pre-fabricated support structure and bringing the adhesive into contact with the graphene. The separating of the graphene and the pre-fabricated support structure from the substrate comprises pulling the pre-fabricated support structure, which leaves the graphene attached to the pre-fabricated support structure by the adhesive. The attaching of the pre-fabricated support structure to the graphene further comprises attaching the pre-fabricated support structure to the substrate beyond where the pre-fabricated support structure attaches to the graphene. The attaching of the pre-fabricated support structure to the graphene further comprises attaching the pre-fabricated support structure to the substrate beyond where the pre-fabricated support structure attaches to the graphene. INDEPENDENT CLAIMS are included for: (1) a method of depositing material; and (2) a graphene-based structure. DESCRIPTION OF DRAWING(S) - The drawing shows an optical microscopy images taken in the course of preparation of a suspended graphene membrane.