• 专利标题:   CVD graphene composite doping structure, has CVD graphene layer, composite doping layer, encapsulation layer, and target substrate layer that are arranged in order from top to bottom.
  • 专利号:   CN108198746-A
  • 发明人:   XU X, JIANG H, MA J
  • 专利权人:   CHONGQING GRAPHENE TECH CO LTD
  • 国际专利分类:   H01L021/02
  • 专利详细信息:   CN108198746-A 22 Jun 2018 H01L-021/02 201849 Pages: 16 Chinese
  • 申请详细信息:   CN108198746-A CN11469778 29 Dec 2017
  • 优先权号:   CN11469778

▎ 摘  要

NOVELTY - The CVD graphene composite doping structure has a CVD graphene layer (102), a composite doping layer (200), an encapsulation layer (300), and a target substrate layer (400) that are arranged in order from top to bottom. The graphene layer is generated which comprises a two-dimensional continuous structure on the catalytic substrate. The substrate and the graphene layer are to be catalyzed into the sealed cavity. The pressure is reduced in the sealed chamber until the pressure in the closed chamber drop to predefined value. USE - CVD graphene composite doping structure. ADVANTAGE - The CVD graphene composite doping structure obtains stable and long-lasting doping effect. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for preparation method of CVD graphene composite doping structure. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of CVD graphene composite doping structure. CVD graphene layer (102) Composite doping layer (200) Encapsulation layer (300) Target substrate layer (400)