• 专利标题:   Composite solid supporting beam for use as commercial micro-electromechanical system switch, has single graphene layer formed on gold layer that is formed at lower surface of composite structure.
  • 专利号:   CN107640740-A
  • 发明人:   ZHANG T, WANG Y, WANG H, CHEN Z, AN J, BAO J
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   B81C001/00
  • 专利详细信息:   CN107640740-A 30 Jan 2018 B81C-001/00 201814 Pages: 14 Chinese
  • 申请详细信息:   CN107640740-A CN10834957 15 Sep 2017
  • 优先权号:   CN10834957

▎ 摘  要

NOVELTY - The beam has a single graphene layer formed on a gold layer that is formed at a lower surface of a composite structure. Thickness of the gold layer is about 250-500 nm. A supporting beam structure is formed by three-layer composite material i.e. metal-graphene-metal material. USE - Composite solid supporting beam for use as a commercial micro-electromechanical system switch. ADVANTAGE - The beam is easy to manufacture, simple in structure and inexpensive, and easily integrated with a complementary metal oxide semiconductor (CMOS) circuit composite clamped beam. The beam can be utilized as a micro-electromechanical system switch due to smaller Youngs modulus and modulus of elasticity of the beam so as to reduce switching driving voltage. The beam has high mechanical strength, strong operation controllability and better reliability. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a composite solid supporting beam manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a composite solid supporting beam.