▎ 摘　　要

NOVELTY - The layer structure has a diffusion barrier layers (76,80,90). A first material layer is on a side of the diffusion barrier layer. A second material layer is on another side of the diffusion barrier layer. The diffusion barrier layer includes a nano-crystalline graphene layer and also comprises a non-graphene metal compound layer, graphene layer and metal layer. The first material layer comprises a trench and the diffusion barrier layer covers a surface of the trench. USE - Layer structure for electronic device. ADVANTAGE - The layer structure having a diffusion barrier layer reduces resistance increment according to a critical dimension reduction and prevents an unnecessary material from diffusing into peripheral regions. The reduction of characteristics of the corresponding electronic devices is reduced or prevented. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of manufacturing a layer structure. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view illustrating a layer structure. Lower layer (70) Diffusion barrier layers (76,80,90) Intermediate layer (88) Insulating layer (92) Dotted box (102)